期刊刊名：南台學報 　 卷期：37卷1期

篇名出版日期：2012年5月1日

作者：Keh-Moh Lin, Hsin-Cheng Chen,林克默,陳信誠

語言：English

關鍵字：載子活化,紅外線加熱,氧化鋅,溶膠凝膠法,透明導電氧化物,Carrier Activation, Infrared Heating, Zinc Oxide, Sol-gel, Transparent Conductive Oxide

被點閱次數：8次

閱讀時間：57sec

摘要：
The purpose of this paper is to examine how Infrared heating procedure affects the opto-electrical and chemical properties of ZnO: Al (AZO) films and to investigate the influences of Al and Mg elements on the dopant activation of AZO films prepared by sol-gel method. In our experiments, the infrared heating method effectively enhanced the activation effects of Al dopant and thus improved the conductivity of AZO films. Moreover, the electropositive Mg was successfully used to modify the complex structure in the sol solution and to affect the nucleation as well as the carrier activation behaviors of the AZO films. Experimental results show that adding Mg could slightly increase the carrier concentration because it productively constrained the precipitation of zinc monoacetate in the sol-solution and retarded the oxidation of Al during the film growth process. Yet too much Mg lowered the carrier mobility, and the conductivity was thus reduced.

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