期刊刊名：黎明學報 　 卷期：24卷2期

篇名出版日期：2013年7月31日

作者：陳峯元,張瑞慶,郭銘駿,黃正熙,Feng-Yuan Chen, Rwei-Ching Chang,Ming-Jun Kuo, Chen-Hsi Huang

語言：English

關鍵字：Nanoindentation, FEM, thin film, multilayered coatings,奈米壓痕,有限元素法,薄膜,多層薄膜

被點閱次數：3次

閱讀時間：22sec

摘要：
In this paper, the mechanical properties of multilayered coatings at nanoscale are studied by nanoindentation and numerical simulation. At first, the thin film Ti, Cu or Cr on substrate Si (i.e., Ti/Si, Cu/Si and Cr/Si) were conducted with nanoindentation, the Young’s modulus of Ti, Cu and Cr films can be obtained by using the Oliver and Pharr method. Moreover, based on elastic and elastic-perfectly plastic material models, the finite element method was employed to determine the yield stress of all thin films. In addition, two different multilayered coatings (i.e., Ti/Cu/Si and Ti/Cr/Si) were conducted by nanoindentation and simulated by finite element analysis to assess the effect of various layer of the multilayered coatings. Finally, it is concluded that the maximum depth increases with the increasing of softer middle layer thickness and decreases with the increasing of harder middle layer thickness. The maximum depth decrease either decreasing middle thickness Cu or increasing surface thickness Ti at the multilayered coatings Ti/Cu/Si.

　　　　　[全文下載]