期刊刊名：黎明學報 　 卷期：25卷2期

篇名出版日期：2014年7月31日

作者：陳峯元,張瑞慶,Feng-Yuan Chen, Rwei-Ching Chang

語言：English

關鍵字：Nanoindentation, FEM, elastic-plastic, viscoplastic, thin films, 奈米壓痕儀實驗,有限元素法,彈完全塑性,黏塑性,薄膜

被點閱次數：3次

閱讀時間：13sec

摘要：
In this paper, a three side pyramidal Berkovich probe tip was used in nanoindentation test and finite element method (FEM) was taken to simulate and determine the mechanical properties of the Ti film on Si substrate. The elastic-perfectly plastic and viscoplastic material properties were employed in the FEM to reproduce the load-depth curves of nanoindentation. The results showed that comparison of the experimental data and numerical results demonstrated that finite element approach is capable of reproducing the load-depth curves of nanoindentation test and while the viscoplastic material properties are adopted in the FEM analysis, the load-depth curves of numerical simulation are very close to the experimental curves.

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