期刊刊名：黎明學報 　 卷期：26卷1期

篇名出版日期：2015年1月31日

作者：陳峯元,張瑞慶, Feng-Yuan Chen, Rwei-Ching Chang

語言：English

關鍵字：Middle Layer, multilayered coating, nanoindentation, and FEM,中間層,多層薄膜,奈米壓痕儀及有限元素法

被點閱次數：3次

閱讀時間：51sec

摘要：
In this paper, the middle layer effect of multilayered coatings on nanoindentation with Berkovich probe tip was investigated with the finite element analysis. Firstly, the bulk material Si and the Ti, Cu and Cr films on Si substrate (i.e., Ti/Si, Cu/Si and Cr/Si) were conducted with a high-resolution nanomechanical test. The Young’s modulus of the bulk material Si and Ti, Cu and Cr films can be obtained by using the Oliver and Pharr method [1]. Moreover, based on the elastic-perfectly plastic material model, the finite element method was employed to determine the yield stress of all thin films and the bulk material Si. Secondary, multilayered coatings with different thickness and different material (i.e., Ti/Cu/Si and Ti/Cr/Si) of the middle layer were conducted by nanoindentation and simulated by finite element analysis. Finally, the results showed that comparison of the experimental data and numerical results demonstrated that finite element approach is capable of reproducing the load-depth curves of nanoindentation test at multilayered coatings problems. Furthermore, it is concluded that the lager thickness of soft middle layer material is the softer surface film response, and the harder middle layer material is the harder surface film response.

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