期刊刊名：南台學報 卷期：40卷3期
篇名出版日期：2015年9月1日
作者：許藝菊,李杰瑞,李曉薇,Yi-Chu Hsu, Jeffrey Levin, Hsiao-Wei Lee
語言：English
關鍵字：UV Curable Adhesive,NOA81,Peristaltic Micropump,接合強度,紫外線固化膠粘劑,蠕動微泵
被點閱次數：3次
閱讀時間：8sec
摘要： This study fabricates a peristaltic micropump using UV curable adhesive (NOA81) as bonding material and microchannel structure. First of all, the highest bonding strength of NOA81 is 10.18 J/m², achieved at 7 minutes by UV. The micropump's main body was fully cured for 7 minutes and heated on a hotplate for 12 hours at 50°C for stabilization. Secondly, the curing times for these experiments include 1 minute, 5 minutes, up to 60 minutes. According to the measurements, geometrical errors for 10 minute samples were below the maximum tolerance (10%), while the other samples were above 10%. Standard deviation for each target area was compared. For channel area, the biggest standard deviation is 4.611 μm, while standard deviation for chamber area is 0.514 μm, and these values are very small compared to depth values. This shows the consistency of the NOA81 to replicate microstructure. Razor blade test was utilized to measure NOA81 bonding strength. Finally, the pump performance fabricated by NOA81 with optimal curing process was tested. The highest membrane displacement and flow rate of the NOA81 based micropump are 0.824 μm and 21.87 μl/min, respectively, while the maximum backpressure is 4.42 Pa. The flow rate is small because the micropump's channels are shallow and the shallow channels will produce high fluidic resistance. NOA81 structure also has low Young's Modulus. During actuation process, the NOA81 with low Young's Modulus structure undergoes a deformation, also making the backpressure smaller.
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